Thermosonic Flip Chip Interconnection Using Electroplated Copper Column Arrays
نویسندگان
چکیده
منابع مشابه
3-d Analysis of a Copper Flip-chip Interconnection Using Fib-sem Slice and View
Recently, flip-chip assembly has become mainstream for fine-pitch interconnection in large-scale integration packages. Gold studs and copper pillars with solder caps are two types of bumps in common use.[1] Gold stud bumps are commonly used for interconnecting dice with peripheral layouts. Gold-gold bonding has the advantage of a low process temperature, and gold-solder with adhesive has good w...
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Thermosonic flip-chip bonding is a wire bonding technology modified for flip-chip assembly. Compared with the soldering technology, it is simpler, faster and more costeffective. Unfortunately, the yield of thermosonic bonding is low and unreliable because it is difficult to control the ultrasonic energy transmission. A small planarity angle between the bonding tool and stage can result in a non...
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This work presents a parallel electrical interconnection process by means of flip-chip, selective electroplating and bonding. The electrical interconnection lines are built on a glass substrate made of 500/2000 Å of Cr/Au with 3150 lm in length and 10 lm in width. Two silicon chips are processed as the device chips to be electrically interconnected. It has been demonstrated that 98 out of 102 i...
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ژورنال
عنوان ژورنال: IEEE Transactions on Advanced Packaging
سال: 2006
ISSN: 1521-3323
DOI: 10.1109/tadvp.2006.884812